PRODUCT

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TS3000-DS

300 mm Automated Probe System
For Single- & Double Sided Electro-Optical Integrated Device Testing

  • Travel range

    320 mm x 450 mm (12.6 x 17.7 in)

  • Resolution

    0.5 µm

  • Accuracy

    < 2.0 µm (0.08 mils)

  • Repeatability

    < 1.0 µm

  • XY stage drive

    Closed-loop high precision stepper motors

  • Speed

    Slowest: 10 μm / sec | Fastest: 40 mm / sec

Designed for Silicon Photonics Device Testing 

• Dual sided device testing, top & bottom 

• Supports O-O, E-O, O-E, E-E device types 

• Integrated Z-distance calibration guarantees accurate probe to device distance 

• Temperature device cycling from ambient to +150°C

 

Optical Setup 

• Hexapod+NanoPositioner combination, for high precision and ultra-fast fiber probe alignment 

• Grating and Edge fiber probe coupling 

• East and West configurations 

• Double sided, top & bottom 

 

Electrical Setup 

• Probe card in 4.5 inch width format 

• DC and RF MicroPositioners 

• Single sided, top 

• Optional high-pin count support, up to 35kg force 

 

Ergonomic Design and Footprint 

• Easy wafer or single DUT loading from the front 

• Integrated active vibration isolation 

• Intelligent integrated prober control, for fast and accurate operation 

• Optional test instrumentation shelf enables short cable routing, supporting high frequency applications