Universal Use

​• ​Designed for wide variety of applications such as Device Characterization and Modeling, Wafer Level Reliability, Failure Analysis, IC Engineering, MEMS and High Power

Ergonomic Design  

• Unique puck controlled air bearing stage for quick single-handed operation 

• Rigid platen accommodates up to 10 DC or 4 RF positioners 

• Highly repeatable platen lift design with three discrete positions for contact, separation, and loading 

Upgradability  

• Available with various chuck options and wide range of accessories such as DC/RF/mmW MicroPositioners, Optics, microscopes and 

EMI shielded dark box to support various application requirements