BRAND

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TS2000-IFE Series

200 mm Automated Probe Systems
The Dedicated System for mmW, Load-pull, SiPH and Product Engineering

  • Travel range

    220 x 490 mm (8.66 x 19.29 in)

  • Resolution

    0.2 µm

  • Accuracy

    < 2.0 µm (0.08 mils)

  • Repeatability

    < 1 µm

  • XY stage drive

    Closed-loop high precision stepper motors

  • Speed

    Slowest: 10 μm / sec | Fastest: 50 mm / sec

Designed for Variety of On-Wafer Applications 

• DC-IV / DC-CV / Pulsed-IV applications 

• Silicon photonics 

• RF, mmW, load-pull applications & 4-port setup 

• IC Design Validation, Failure Analysis in wide temperature range from -60 to 300 °C 

• Wafer Level Reliability 

 

Extended Flexibility 

• MPI IceFreeEnvironment™ for using MicroPositioners and probe cards simultaneously, 

  even at negative temperature 

• Programmable microscope movements for more automation and ease of use 

• The shortest cable interface to IC tester 

• Minimize the platen-to-chuck distance for mmW & probing with active probes 

• Supports film-frame probing 

 

Ergonomic Design and Footprint 

• Easy wafer or single DUT loading from the front 

• Integrated active vibration isolation 

• Completely integrated prober control for faster, safer and convenient system and test operation 

• The Safety Test Management (STM™) with automated dew point control 

• Reduced footprint due to smart chiller space arrangement 

• Instrument shelf option for shorter cables and higher measurement dynamic