TS3000-DS
300 mm Automated Probe System
For Single- & Double Sided Electro-Optical Integrated Device Testing
320 mm x 450 mm (12.6 x 17.7 in)
0.5 µm
< 2.0 µm (0.08 mils)
< 1.0 µm
Closed-loop high precision stepper motors
Slowest: 10 μm / sec | Fastest: 40 mm / sec
Designed for Silicon Photonics Device Testing
• Dual sided device testing, top & bottom
• Supports O-O, E-O, O-E, E-E device types
• Integrated Z-distance calibration guarantees accurate probe to device distance
• Temperature device cycling from ambient to +150°C
Optical Setup
• Hexapod+NanoPositioner combination, for high precision and ultra-fast fiber probe alignment
• Grating and Edge fiber probe coupling
• East and West configurations
• Double sided, top & bottom
Electrical Setup
• Probe card in 4.5 inch width format
• DC and RF MicroPositioners
• Single sided, top
• Optional high-pin count support, up to 35kg force
Ergonomic Design and Footprint
• Easy wafer or single DUT loading from the front
• Integrated active vibration isolation
• Intelligent integrated prober control, for fast and accurate operation
• Optional test instrumentation shelf enables short cable routing, supporting high frequency applications